Characterization in Silicon Processing

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Engineering
Characterization in Silicon Processing

Characterization in Silicon Processing

Name: Characterization in Silicon Processing
ISBN: 9780750691727

Strausser, Yale

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This book reviews techniques by which silicon processing engineers working with semiconductors can meet the demands for improved material quality and performance made necessary by increasingly stringent requirements, such as decreasing barrier film thicknesses. Among the techniques described are monitoring the effectiveness of surface cleaning processes; determining the amount of silicon consumption during barrier film and silicide growth; and silicon selective epitaxial growth.

Categories:

Engineering

Year:

1993

Publisher:

Elsevier

Language:

english

Pages:

240

ISBN 10:

0750691727