Handbook of plasma processing technology: fundamentals,...

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Handbook of plasma processing...

Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions

Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber

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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Kategorie:

Rok:

1990

Wydawnictwo:

Noyes Publications

Język:

english

Strony:

535

ISBN 10:

0815517637

ISBN 13:

9780815517634

Serie:

Materials science and process technology series

Plik:

DJVU, 4.98 MB

IPFS:

,

english, 1990

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